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Semiconductor Manufacturing Technology
by Michael Quirk and Julian Serda
© 2001 by Prentice Hall
ISBN 0-13-081520-9
Summary
The SMT book introduces the terminology, concepts, processes, products,
and equipment commonly used in the manufacture of ultra-large-scale integrated
(ULSI) semiconductors. The book provides helpful, up-to-date technical
information about semiconductor manufacturing and strikes an effective
balance between the process and equipment technology found in wafer fabrications.
Target Audience
The audience for the SMT book includes students or employees of:
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Two-year semiconductor manufacturing technology programs in community
colleges and technical schools
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Four-year technology programs
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Industrial education for employees working as operators, technicians,
and engineers in manufacturing and support areas from crystal growth
and wafer fabrication through test and assembly and packaging
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Technology education for employees working in sales, marketing, and
customer support positions
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Anyone interested in learning about the history of semiconductor
manufacturing, what has driven the technology to where it is in the
year 2000, and where it plans to be in ten years
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